- [CAS Name]1,1,1,3,3,3-Hexamethyldisilazane
- [Alias]HMDS; Hexamethyldisilazane; DYNASYLAN HMDS; Bis(trimethylsilyl)amine; 1,1,1,3,3,3,-HEXAMETHYLDISILA-
- [Number]999-97-3
- [EINECS]213-668-5
- [Formula]C6H19NSi2
- [Molecular weight]161.39
- [Melting point]-78℃
- [Boiling point]125℃